Resolution limits and process latitude of comformable contact nano-lithography

Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2007.

书目详细资料
主要作者:	Fucetola, Corey Patrick
其他作者:	David J. Carter and Henry I. Smith.
格式:	Thesis
语言:	eng
出版:	Massachusetts Institute of Technology 2008
主题:	Electrical Engineering and Computer Science.
在线阅读:	http://hdl.handle.net/1721.1/41640

因特网

http://hdl.handle.net/1721.1/41640