Dynamic nanometer alignment for nanofabrication and metrology

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.

书目详细资料
主要作者: Moon, Euclid E. (Euclid Eberle), 1965-
其他作者: Henry I. Smith.
格式: Thesis
语言:eng
出版: Massachusetts Institute of Technology 2008
主题:
在线阅读:http://hdl.handle.net/1721.1/41799