Dynamic nanometer alignment for nanofabrication and metrology

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.

Bibliographic Details
Main Author:	Moon, Euclid E. (Euclid Eberle), 1965-
Other Authors:	Henry I. Smith.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2008
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/41799

Internet

http://hdl.handle.net/1721.1/41799