Dynamic nanometer alignment for nanofabrication and metrology

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.

书目详细资料
主要作者:	Moon, Euclid E. (Euclid Eberle), 1965-
其他作者:	Henry I. Smith.
格式:	Thesis
语言:	eng
出版:	Massachusetts Institute of Technology 2008
主题:	Electrical Engineering and Computer Science
在线阅读:	http://hdl.handle.net/1721.1/41799

因特网

http://hdl.handle.net/1721.1/41799