Characterization of mechanical and optical properties of x-ray mask membranes
Includes bibliographical references (leaves 48-49).
| Muut tekijät: | |
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| Kieli: | eng |
| Julkaistu: |
Research Laboratory of Electronics, Massachusetts Institute of Technology
2004
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| Aiheet: | |
| Linkit: | http://hdl.handle.net/1721.1/4188 |