Characterization of mechanical and optical properties of x-ray mask membranes

Characterization of mechanical and optical properties of x-ray mask membranes

Includes bibliographical references (leaves 48-49).

Bibliographic Details
Other Authors:	Tsai, Flora S.
Language:	eng
Published:	Research Laboratory of Electronics, Massachusetts Institute of Technology 2004
Subjects:	TK7855.M41 R43 no.564
Online Access:	http://hdl.handle.net/1721.1/4188

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