Effects of mechanical properties on the reliability of Cu/low-k metallization systems

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2007.

Bibliographic Details
Main Author:	Wei, Frank L. (Frank Lili), 1977-
Other Authors:	Carl V. Thompson.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2008
Subjects:	Materials Science and Engineering.
Online Access:	http://hdl.handle.net/1721.1/42026

Internet

http://hdl.handle.net/1721.1/42026