Strained SiGe-channel p-MOSFETs : impact of heterostructure design and process technology

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2007.

Bibliographic Details
Main Author: Ní Chléirigh, Cáit
Other Authors: Judy L. Hoyt.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2008
Subjects:
Online Access:http://hdl.handle.net/1721.1/42236