Absorbance modulation optical lithography

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2007.

Detalhes bibliográficos
Autor principal:	Tsai, Hsin-Yu Sidney
Outros Autores:	Henry I. Smith.
Formato:	Tese
Idioma:	eng
Publicado em:	Massachusetts Institute of Technology 2009
Assuntos:	Electrical Engineering and Computer Science.
Acesso em linha:	http://dspace.mit.edu/handle/1721.1/42253 http://hdl.handle.net/1721.1/42253

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