Nano-scale scratching in chemical-mechanical polishing

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2008.

Bibliographic Details
Main Author:	Eusner, Thor
Other Authors:	Jung-Hoon Chun and Nannaji Saka.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2008
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/43133

Internet

http://hdl.handle.net/1721.1/43133