Nano-scale scratching in chemical-mechanical polishing

Nano-scale scratching in chemical-mechanical polishing

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2008.

Bibliographic Details
Main Author: Eusner, Thor
Other Authors: Jung-Hoon Chun and Nannaji Saka.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2008
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/43133

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