3-dimensional modeling and simulation of surface and sidewall roughening during plasma etching

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 2008.

Bibliographic Details
Main Author:	Kawai, Hiroyo
Other Authors:	Herbert H. Sawin.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2008
Subjects:	Chemical Engineering.
Online Access:	http://hdl.handle.net/1721.1/43201

Internet

http://hdl.handle.net/1721.1/43201