3-dimensional modeling and simulation of surface and sidewall roughening during plasma etching

3-dimensional modeling and simulation of surface and sidewall roughening during plasma etching

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 2008.

Bibliographic Details
Main Author: Kawai, Hiroyo
Other Authors: Herbert H. Sawin.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2008
Subjects:
Chemical Engineering.
Online Access:http://hdl.handle.net/1721.1/43201

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