Atom abstraction in the interaction of F₂ and XeF₂ with Si(100)

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemistry, 1997.

Bibliographic Details
Main Author:	Gosalvez-Blanco, David, 1968-
Other Authors:	Sylvia T. Ceyer.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2008
Subjects:	Chemistry
Online Access:	http://hdl.handle.net/1721.1/43505

Internet

http://hdl.handle.net/1721.1/43505