A new coating method for semiconductor lithography : fluid layer overlap in extrusion-spin coating

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997.

Bibliographic Details
Main Author:	Derksen, James Stephen
Other Authors:	Jung-Hoon Chun.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2008
Subjects:	Mechanical Engineering
Online Access:	http://hdl.handle.net/1721.1/43575

Internet

http://hdl.handle.net/1721.1/43575