Ultra-high precision scanning beam interference lithography and its application : spatial frequency multiplication

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2008.

Bibliographic Details
Main Author:	Zhao, Yong, 1980-
Other Authors:	Mark L. Schattenburg.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2009
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/44756

Internet

http://hdl.handle.net/1721.1/44756