Control of wafer-scale non-uniformity in chemical-mechanical planarization by face-up polishing

Control of wafer-scale non-uniformity in chemical-mechanical planarization by face-up polishing

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2008.

Bibliographic Details
Main Author: Mau, Catherine (Catherine K.)
Other Authors: Jung-Hoon Chun and Nannaji Saka.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2009
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/45202
Description
Summary:Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2008.

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