Wafer bonding for monolithic integration of Si CMOS VLSI electronics with III-V optoelectronic devices

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, February 1999.

Bibliographic Details
Main Author: London, Joanna M., 1974-
Other Authors: Clifton G. Fonstad, Jr.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2009
Subjects:
Online Access:http://hdl.handle.net/1721.1/45498