A high resolution capacitance-based lateral position microsensor

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997.

Bibliographic Details
Main Author:	Adams, Douglas Edward
Other Authors:	Kamal Youcef-Toumi.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2009
Subjects:	Mechanical Engineering
Online Access:	http://hdl.handle.net/1721.1/46050

Internet

http://hdl.handle.net/1721.1/46050