A high resolution capacitance-based lateral position microsensor

A high resolution capacitance-based lateral position microsensor

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997.

Bibliographic Details
Main Author: Adams, Douglas Edward
Other Authors: Kamal Youcef-Toumi.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2009
Subjects:
Mechanical Engineering
Online Access:http://hdl.handle.net/1721.1/46050

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