Semiconductors and sustainability : energy and materials use in integrated circuit manufacturing

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2008.

Bibliographic Details
Main Author:	Branham, Matthew S
Other Authors:	Timothy G. Gutowski.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2009
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/46056

Internet

http://hdl.handle.net/1721.1/46056