Hot-filament chemical vapor deposition of selectively deposited diamond and silicone thin films

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1997.

Bibliographic Details
Main Author:	Kwan, Michael Chiu, 1969-
Other Authors:	Karen K. Gleason.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2009
Subjects:	Chemical Engineering
Online Access:	http://hdl.handle.net/1721.1/46199

Internet

http://hdl.handle.net/1721.1/46199