Hot-filament chemical vapor deposition of selectively deposited diamond and silicone thin films
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1997.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2009
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| Online Access: | http://hdl.handle.net/1721.1/46199 |
| _version_ | 1826216980201340928 |
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| author | Kwan, Michael Chiu, 1969- |
| author2 | Karen K. Gleason. |
| author_facet | Karen K. Gleason. Kwan, Michael Chiu, 1969- |
| author_sort | Kwan, Michael Chiu, 1969- |
| collection | MIT |
| description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1997. |
| first_indexed | 2024-09-23T16:56:35Z |
| format | Thesis |
| id | mit-1721.1/46199 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T16:56:35Z |
| publishDate | 2009 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/461992019-04-10T09:41:34Z Hot-filament chemical vapor deposition of selectively deposited diamond and silicone thin films Kwan, Michael Chiu, 1969- Karen K. Gleason. Massachusetts Institute of Technology. Dept. of Chemical Engineering Chemical Engineering Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1997. Includes bibliographical references. by Michael Chiu Kwan. Ph.D. 2009-06-30T17:54:06Z 2009-06-30T17:54:06Z 1997 1997 Thesis http://hdl.handle.net/1721.1/46199 41063028 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 183 leaves application/pdf Massachusetts Institute of Technology |
| spellingShingle | Chemical Engineering Kwan, Michael Chiu, 1969- Hot-filament chemical vapor deposition of selectively deposited diamond and silicone thin films |
| title | Hot-filament chemical vapor deposition of selectively deposited diamond and silicone thin films |
| title_full | Hot-filament chemical vapor deposition of selectively deposited diamond and silicone thin films |
| title_fullStr | Hot-filament chemical vapor deposition of selectively deposited diamond and silicone thin films |
| title_full_unstemmed | Hot-filament chemical vapor deposition of selectively deposited diamond and silicone thin films |
| title_short | Hot-filament chemical vapor deposition of selectively deposited diamond and silicone thin films |
| title_sort | hot filament chemical vapor deposition of selectively deposited diamond and silicone thin films |
| topic | Chemical Engineering |
| url | http://hdl.handle.net/1721.1/46199 |
| work_keys_str_mv | AT kwanmichaelchiu1969 hotfilamentchemicalvapordepositionofselectivelydepositeddiamondandsiliconethinfilms |