Hot-filament chemical vapor deposition of selectively deposited diamond and silicone thin films

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1997.

Detalhes bibliográficos
Autor principal:	Kwan, Michael Chiu, 1969-
Outros Autores:	Karen K. Gleason.
Formato:	Tese
Idioma:	eng
Publicado em:	Massachusetts Institute of Technology 2009
Assuntos:	Chemical Engineering
Acesso em linha:	http://hdl.handle.net/1721.1/46199

Internet

http://hdl.handle.net/1721.1/46199