Hot-filament chemical vapor deposition of selectively deposited diamond and silicone thin films

Hot-filament chemical vapor deposition of selectively deposited diamond and silicone thin films

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1997.

Bibliographic Details
Main Author: Kwan, Michael Chiu, 1969-
Other Authors: Karen K. Gleason.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2009
Subjects:
Chemical Engineering
Online Access:http://hdl.handle.net/1721.1/46199

Similar Items

Similar Items