Increased semiconductor fabrication capacity through cross-site processing

Increased semiconductor fabrication capacity through cross-site processing

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science; and, (S.M.)--Massachusetts Institute of Technology, Sloan School of Management, 1998.

Bibliographic Details
Main Author: Cowger, Christopher L. (Christopher Leland), 1971-
Other Authors: Thomas L. Magnanti and James E. Chung.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2009
Subjects:
Electrical Engineering and Computer Science
Sloan School of Management
Online Access:http://hdl.handle.net/1721.1/46221

Internet

http://hdl.handle.net/1721.1/46221

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