Increased semiconductor fabrication capacity through cross-site processing
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science; and, (S.M.)--Massachusetts Institute of Technology, Sloan School of Management, 1998.
Main Author: | Cowger, Christopher L. (Christopher Leland), 1971- |
---|---|
Other Authors: | Thomas L. Magnanti and James E. Chung. |
Format: | Thesis |
Language: | eng |
Published: |
Massachusetts Institute of Technology
2009
|
Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/46221 |
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