Methods of improving the surface flatness of thin glass sheets and silicon wafers

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2008.

Bibliographic Details
Main Author:	Akilian, Mireille
Other Authors:	Mark L. Schattenburg.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2009
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/46484

Internet

http://hdl.handle.net/1721.1/46484