Methods of improving the surface flatness of thin glass sheets and silicon wafers

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2008.

Bibliografiske detaljer
Hovedforfatter:	Akilian, Mireille
Andre forfattere:	Mark L. Schattenburg.
Format:	Thesis
Sprog:	eng
Udgivet:	Massachusetts Institute of Technology 2009
Fag:	Mechanical Engineering.
Online adgang:	http://hdl.handle.net/1721.1/46484

Internet

http://hdl.handle.net/1721.1/46484