Methods of improving the surface flatness of thin glass sheets and silicon wafers
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2008.
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Format: | Thesis |
Language: | eng |
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Massachusetts Institute of Technology
2009
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Online Access: | http://hdl.handle.net/1721.1/46484 |
Summary: | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2008. |
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