Methods of improving the surface flatness of thin glass sheets and silicon wafers

Methods of improving the surface flatness of thin glass sheets and silicon wafers

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2008.

Bibliographic Details
Main Author: Akilian, Mireille
Other Authors: Mark L. Schattenburg.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2009
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/46484

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