Kinetics modeling and 3-dimensional simulation of surface roughness during plasma etching

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 2009.

Bibliographic Details
Main Author:	Guo, Wei, Ph. D. Massachusetts Institute of Technology
Other Authors:	Herbert H. Swain.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2009
Subjects:	Chemical Engineering.
Online Access:	http://hdl.handle.net/1721.1/46600

Internet

http://hdl.handle.net/1721.1/46600