A distributed software architecture for semiconductors process design

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.

Bibliographic Details
Main Author:	Verminski, Matthew D. (Matthew David), 1974-
Other Authors:	Michael B. McIlrath, Donald E. Troxel.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2009
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/47433

Internet

http://hdl.handle.net/1721.1/47433