A distributed software architecture for semiconductors process design

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.

Dades bibliogràfiques
Autor principal: Verminski, Matthew D. (Matthew David), 1974-
Altres autors: Michael B. McIlrath, Donald E. Troxel.
Format: Thesis
Idioma:eng
Publicat: Massachusetts Institute of Technology 2009
Matèries:
Accés en línia:http://hdl.handle.net/1721.1/47433