A distributed software architecture for semiconductors process design
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2009
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| Online Access: | http://hdl.handle.net/1721.1/47433 |
| _version_ | 1811080089536823296 |
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| author | Verminski, Matthew D. (Matthew David), 1974- |
| author2 | Michael B. McIlrath, Donald E. Troxel. |
| author_facet | Michael B. McIlrath, Donald E. Troxel. Verminski, Matthew D. (Matthew David), 1974- |
| author_sort | Verminski, Matthew D. (Matthew David), 1974- |
| collection | MIT |
| description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. |
| first_indexed | 2024-09-23T11:25:39Z |
| format | Thesis |
| id | mit-1721.1/47433 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T11:25:39Z |
| publishDate | 2009 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/474332019-04-10T08:21:57Z A distributed software architecture for semiconductors process design Verminski, Matthew D. (Matthew David), 1974- Michael B. McIlrath, Donald E. Troxel. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. Includes bibliographical references (leaves 67-68). by Matthew D. Verminski. M.S. 2009-10-01T15:10:52Z 2009-10-01T15:10:52Z 1998 1998 Thesis http://hdl.handle.net/1721.1/47433 39134655 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 87 leaves application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science Verminski, Matthew D. (Matthew David), 1974- A distributed software architecture for semiconductors process design |
| title | A distributed software architecture for semiconductors process design |
| title_full | A distributed software architecture for semiconductors process design |
| title_fullStr | A distributed software architecture for semiconductors process design |
| title_full_unstemmed | A distributed software architecture for semiconductors process design |
| title_short | A distributed software architecture for semiconductors process design |
| title_sort | distributed software architecture for semiconductors process design |
| topic | Electrical Engineering and Computer Science |
| url | http://hdl.handle.net/1721.1/47433 |
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