A distributed software architecture for semiconductors process design

A distributed software architecture for semiconductors process design

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.

Bibliographic Details
Main Author: Verminski, Matthew D. (Matthew David), 1974-
Other Authors: Michael B. McIlrath, Donald E. Troxel.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2009
Subjects:
Electrical Engineering and Computer Science
Online Access:http://hdl.handle.net/1721.1/47433

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