Correlation of silicon microroughness with electrical parameters of SOI-AS (silicon-on-insulator with active substrate)

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.

Bibliographic Details
Main Author:	Nayfeh, Hasan M. (Hasan Munir), 1974-
Other Authors:	Dimitri A. Antoniadis.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2009
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/47504

Internet

http://hdl.handle.net/1721.1/47504