Correlation of silicon microroughness with electrical parameters of SOI-AS (silicon-on-insulator with active substrate)

Correlation of silicon microroughness with electrical parameters of SOI-AS (silicon-on-insulator with active substrate)

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.

Bibliographic Details
Main Author: Nayfeh, Hasan M. (Hasan Munir), 1974-
Other Authors: Dimitri A. Antoniadis.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2009
Subjects:
Electrical Engineering and Computer Science
Online Access:http://hdl.handle.net/1721.1/47504

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