Demonstration of chalcogenide glass racetrack microresonators

We have demonstrated what we believe to be the first chalcogenide glass racetrack microresonator using a complementary metal-oxide semiconductor-compatible lift-off technique with thermally evaporated As[subscript 2]S[subscript 3] films. The device simultaneously features a small footprint of 0.012...

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Bibliographic Details
Main Authors: Petit, Laeticia, Hu, Juejun, Richardson, Kathleen, Carlie, Nathan, Kimerling, Lionel C, Agarwal, Anuradha
Other Authors: Massachusetts Institute of Technology. Materials Processing Center
Format: Article
Language:en_US
Published: Optical Society of America 2009
Online Access:http://hdl.handle.net/1721.1/49475
https://orcid.org/0000-0002-7233-3918
https://orcid.org/0000-0002-3913-6189