Demonstration of chalcogenide glass racetrack microresonators

We have demonstrated what we believe to be the first chalcogenide glass racetrack microresonator using a complementary metal-oxide semiconductor-compatible lift-off technique with thermally evaporated As[subscript 2]S[subscript 3] films. The device simultaneously features a small footprint of 0.012...

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Main Authors: Petit, Laeticia, Hu, Juejun, Richardson, Kathleen, Carlie, Nathan, Kimerling, Lionel C, Agarwal, Anuradha
Other Authors: Massachusetts Institute of Technology. Materials Processing Center
Format: Article
Language:en_US
Published: Optical Society of America 2009
Online Access:http://hdl.handle.net/1721.1/49475
https://orcid.org/0000-0002-7233-3918
https://orcid.org/0000-0002-3913-6189
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author Petit, Laeticia
Hu, Juejun
Richardson, Kathleen
Carlie, Nathan
Kimerling, Lionel C
Agarwal, Anuradha
author2 Massachusetts Institute of Technology. Materials Processing Center
author_facet Massachusetts Institute of Technology. Materials Processing Center
Petit, Laeticia
Hu, Juejun
Richardson, Kathleen
Carlie, Nathan
Kimerling, Lionel C
Agarwal, Anuradha
author_sort Petit, Laeticia
collection MIT
description We have demonstrated what we believe to be the first chalcogenide glass racetrack microresonator using a complementary metal-oxide semiconductor-compatible lift-off technique with thermally evaporated As[subscript 2]S[subscript 3] films. The device simultaneously features a small footprint of 0.012 mm×0.012 mm, a cavity Q (quality factor) of 10,000, and an extinction ratio of 32 dB. These resonators exhibit a very high sensitivity to refractive index changes with a demonstrated detection capability of ΔnAs2S3=(4.5×10[superscript −6] ±10%) refractive index unit. The resonators were applied to derive a photorefractive response of As[subscript 2]S[subscript 3] to λ=550 nm light. The resonator devices are a versatile platform for both sensing and glass material property investigation.
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spelling mit-1721.1/494752022-04-04T19:09:11Z Demonstration of chalcogenide glass racetrack microresonators Petit, Laeticia Hu, Juejun Richardson, Kathleen Carlie, Nathan Kimerling, Lionel C Agarwal, Anuradha Massachusetts Institute of Technology. Materials Processing Center Massachusetts Institute of Technology. Department of Materials Science and Engineering Massachusetts Institute of Technology. Microphotonics Center Hu, Juejun Kimerling, Lionel C. Agarwal, Anuradha Murthy Hu, Juejun We have demonstrated what we believe to be the first chalcogenide glass racetrack microresonator using a complementary metal-oxide semiconductor-compatible lift-off technique with thermally evaporated As[subscript 2]S[subscript 3] films. The device simultaneously features a small footprint of 0.012 mm×0.012 mm, a cavity Q (quality factor) of 10,000, and an extinction ratio of 32 dB. These resonators exhibit a very high sensitivity to refractive index changes with a demonstrated detection capability of ΔnAs2S3=(4.5×10[superscript −6] ±10%) refractive index unit. The resonators were applied to derive a photorefractive response of As[subscript 2]S[subscript 3] to λ=550 nm light. The resonator devices are a versatile platform for both sensing and glass material property investigation. 2009-10-19T13:40:48Z 2009-10-19T13:40:48Z 2008-04 2008-02 Article http://purl.org/eprint/type/SubmittedJournalArticle 0146-9592 http://hdl.handle.net/1721.1/49475 Juejun Hu, Nathan Carlie, Laeticia Petit, Anu Agarwal, Kathleen Richardson, and Lionel Kimerling, "Demonstration of chalcogenide glass racetrack microresonators," Opt. Lett. 33, 761-763 (2008) http://www.opticsinfobase.org/abstract.cfm?URI=ol-33-8-761 https://orcid.org/0000-0002-7233-3918 https://orcid.org/0000-0002-3913-6189 en_US http://dx.doi.org/10.1364/OL.33.000761 Optics Letters Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf Optical Society of America Juejun Hu
spellingShingle Petit, Laeticia
Hu, Juejun
Richardson, Kathleen
Carlie, Nathan
Kimerling, Lionel C
Agarwal, Anuradha
Demonstration of chalcogenide glass racetrack microresonators
title Demonstration of chalcogenide glass racetrack microresonators
title_full Demonstration of chalcogenide glass racetrack microresonators
title_fullStr Demonstration of chalcogenide glass racetrack microresonators
title_full_unstemmed Demonstration of chalcogenide glass racetrack microresonators
title_short Demonstration of chalcogenide glass racetrack microresonators
title_sort demonstration of chalcogenide glass racetrack microresonators
url http://hdl.handle.net/1721.1/49475
https://orcid.org/0000-0002-7233-3918
https://orcid.org/0000-0002-3913-6189
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