Demonstration of chalcogenide glass racetrack microresonators
We have demonstrated what we believe to be the first chalcogenide glass racetrack microresonator using a complementary metal-oxide semiconductor-compatible lift-off technique with thermally evaporated As[subscript 2]S[subscript 3] films. The device simultaneously features a small footprint of 0.012...
Main Authors: | Petit, Laeticia, Hu, Juejun, Richardson, Kathleen, Carlie, Nathan, Kimerling, Lionel C, Agarwal, Anuradha |
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Other Authors: | Massachusetts Institute of Technology. Materials Processing Center |
Format: | Article |
Language: | en_US |
Published: |
Optical Society of America
2009
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Online Access: | http://hdl.handle.net/1721.1/49475 https://orcid.org/0000-0002-7233-3918 https://orcid.org/0000-0002-3913-6189 |
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