The analysis and design of integrated capacitive displacement sensors

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.

Bibliographic Details
Main Author:	Wong, SaiBun, 1976-
Other Authors:	David L. Trumper and Charles G. Sodini.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2009
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/50034

Internet

http://hdl.handle.net/1721.1/50034