Metrology of SIMOX buried oxide and nitride/STI CMP

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1998.

Bibliographic Details
Main Author:	Yoon, Jung Uk, 1971-
Other Authors:	James E. Chung and Carl V. Thompson.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2010
Subjects:	Materials Science and Engineering
Online Access:	http://hdl.handle.net/1721.1/50518

Internet

http://hdl.handle.net/1721.1/50518