Metrology of SIMOX buried oxide and nitride/STI CMP

Metrology of SIMOX buried oxide and nitride/STI CMP

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1998.

Opis bibliograficzny
1. autor: Yoon, Jung Uk, 1971-
Kolejni autorzy: James E. Chung and Carl V. Thompson.
Format: Praca dyplomowa
Język:eng
Wydane: Massachusetts Institute of Technology 2010
Hasła przedmiotowe:
Materials Science and Engineering
Dostęp online:http://hdl.handle.net/1721.1/50518
Opis
Streszczenie:Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1998.

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