Metrology of SIMOX buried oxide and nitride/STI CMP

Metrology of SIMOX buried oxide and nitride/STI CMP

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1998.

Bibliographic Details
Main Author: Yoon, Jung Uk, 1971-
Other Authors: James E. Chung and Carl V. Thompson.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2010
Subjects:
Materials Science and Engineering
Online Access:http://hdl.handle.net/1721.1/50518

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