Lack of spatial correlation in mosfet threshold voltage variation and implications for voltage scaling
Due to increased variation in modern process technology nodes, the spatial correlation of variation is a key issue for both modeling and design. We have created a large array test-structure to analyze the magnitude of spatial correlation of threshold voltage (VT) in a 180 nm CMOS process. The data f...
Main Authors: | , , |
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Other Authors: | |
Format: | Article |
Language: | en_US |
Published: |
Institute of Electrical and Electronics Engineers
2010
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Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/52377 https://orcid.org/0000-0002-5977-2748 https://orcid.org/0000-0002-0417-445X |