Lack of spatial correlation in mosfet threshold voltage variation and implications for voltage scaling

Due to increased variation in modern process technology nodes, the spatial correlation of variation is a key issue for both modeling and design. We have created a large array test-structure to analyze the magnitude of spatial correlation of threshold voltage (VT) in a 180 nm CMOS process. The data f...

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Bibliographic Details
Main Authors: Boning, Duane S., Drego, Nigel A., Chandrakasan, Anantha P.
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:en_US
Published: Institute of Electrical and Electronics Engineers 2010
Subjects:
Online Access:http://hdl.handle.net/1721.1/52377
https://orcid.org/0000-0002-5977-2748
https://orcid.org/0000-0002-0417-445X