Lithographically directed materials assembly
We have developed a processing method that significantly reduces the number of steps necessary to yield a surface that directs block copolymer assembly. This methodology employs a single resistless lithography step that directly changes the surface energy without requiring subsequent material deposi...
| Main Authors: | , , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Language: | en_US |
| Published: |
The International Society for Optical Engineering
2010
|
| Online Access: | http://hdl.handle.net/1721.1/52659 |