PAG segregation during exposure affecting innate material roughness
We have developed an improved AFM-based technique to measure intrinsic material roughness (IMR) after base development. We have investigated the contribution of different polymeric PAGs to IMR. These polymeric PAGs include copolymers of several styrenic PAGs with hydroxystyrene. The IMR of these pol...
| Main Authors: | , , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | en_US |
| Published: |
The International Society for Optical Engineering
2010
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| Online Access: | http://hdl.handle.net/1721.1/52663 |