5000 Groove/mm multilayer-coated blazed grating with 33% efficiency in the 3rd order in the EUV wavelength range

5000 Groove/mm multilayer-coated blazed grating with 33% efficiency in the 3rd order in the EUV wavelength range

We report on recent progress in developing diffraction gratings which can potentially provide extremely high spectral resolution of 10[superscript 5]-10[superscript 6] in the EUV and soft x-ray photon energy ranges. Such a grating was fabricated by deposition of a multilayer on a substrate which con...

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Detalhes bibliográficos
Principais autores: Schattenburg, Mark Lee, Chang, Chih-Hao, Ahn, Minseung, Padmore, Howard A., Yashchuk, Valeriy V., Gullikson, Eric M., Salmassi, Farhad, Cambie, Rossana, Anderson, Erik H., Voronov, Dmitriy L., Heilmann, Ralf K
Outros Autores: MIT Kavli Institute for Astrophysics and Space Research
Formato: Artigo
Idioma:en_US
Publicado em: The International Society for Optical Engineering 2010
Acesso em linha:http://hdl.handle.net/1721.1/52705
https://orcid.org/0000-0001-6932-2612

Internet

http://hdl.handle.net/1721.1/52705
https://orcid.org/0000-0001-6932-2612

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