5000 Groove/mm multilayer-coated blazed grating with 33% efficiency in the 3rd order in the EUV wavelength range
We report on recent progress in developing diffraction gratings which can potentially provide extremely high spectral resolution of 10[superscript 5]-10[superscript 6] in the EUV and soft x-ray photon energy ranges. Such a grating was fabricated by deposition of a multilayer on a substrate which con...
| Main Authors: | , , , , , , , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | en_US |
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The International Society for Optical Engineering
2010
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| Online Access: | http://hdl.handle.net/1721.1/52705 https://orcid.org/0000-0001-6932-2612 |
| _version_ | 1826207506482855936 |
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| author | Schattenburg, Mark Lee Chang, Chih-Hao Ahn, Minseung Padmore, Howard A. Yashchuk, Valeriy V. Gullikson, Eric M. Salmassi, Farhad Cambie, Rossana Anderson, Erik H. Voronov, Dmitriy L. Heilmann, Ralf K |
| author2 | MIT Kavli Institute for Astrophysics and Space Research |
| author_facet | MIT Kavli Institute for Astrophysics and Space Research Schattenburg, Mark Lee Chang, Chih-Hao Ahn, Minseung Padmore, Howard A. Yashchuk, Valeriy V. Gullikson, Eric M. Salmassi, Farhad Cambie, Rossana Anderson, Erik H. Voronov, Dmitriy L. Heilmann, Ralf K |
| author_sort | Schattenburg, Mark Lee |
| collection | MIT |
| description | We report on recent progress in developing diffraction gratings which can potentially provide extremely high spectral resolution of 10[superscript 5]-10[superscript 6] in the EUV and soft x-ray photon energy ranges. Such a grating was fabricated by deposition of a multilayer on a substrate which consists of a 6-degree blazed grating with a high groove density. The fabrication of the substrate gratings was based on scanning interference lithography and anisotropic wet etch of silicon single crystals. The optimized fabrication process provided precise control of the grating periodicity, and the grating groove profile, together with very short anti-blazed facets, and near atomically smooth surface blazed facets. The blazed grating coated with 20 Mo/Si bilayers demonstrated a diffraction efficiency in the third order as high as 33% at an incidence angle of 11° and wavelength of 14.18 nm. This work was supported by the US Department of Energy under contract number DE-AC02-05CH11231. |
| first_indexed | 2024-09-23T13:50:42Z |
| format | Article |
| id | mit-1721.1/52705 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T13:50:42Z |
| publishDate | 2010 |
| publisher | The International Society for Optical Engineering |
| record_format | dspace |
| spelling | mit-1721.1/527052022-09-28T16:33:27Z 5000 Groove/mm multilayer-coated blazed grating with 33% efficiency in the 3rd order in the EUV wavelength range Schattenburg, Mark Lee Chang, Chih-Hao Ahn, Minseung Padmore, Howard A. Yashchuk, Valeriy V. Gullikson, Eric M. Salmassi, Farhad Cambie, Rossana Anderson, Erik H. Voronov, Dmitriy L. Heilmann, Ralf K MIT Kavli Institute for Astrophysics and Space Research Heilmann, Ralf K. Schattenburg, Mark Lee Heilmann, Ralf K. Chang, Chih-Hao Ahn, Minseung We report on recent progress in developing diffraction gratings which can potentially provide extremely high spectral resolution of 10[superscript 5]-10[superscript 6] in the EUV and soft x-ray photon energy ranges. Such a grating was fabricated by deposition of a multilayer on a substrate which consists of a 6-degree blazed grating with a high groove density. The fabrication of the substrate gratings was based on scanning interference lithography and anisotropic wet etch of silicon single crystals. The optimized fabrication process provided precise control of the grating periodicity, and the grating groove profile, together with very short anti-blazed facets, and near atomically smooth surface blazed facets. The blazed grating coated with 20 Mo/Si bilayers demonstrated a diffraction efficiency in the third order as high as 33% at an incidence angle of 11° and wavelength of 14.18 nm. This work was supported by the US Department of Energy under contract number DE-AC02-05CH11231. United States Department of Energy (contract number DE-AC02-05CH11231) 2010-03-18T15:01:08Z 2010-03-18T15:01:08Z 2009-09 Article http://purl.org/eprint/type/JournalArticle 0277-786X http://hdl.handle.net/1721.1/52705 Voronov, Dmitriy L. “5000 groove/mm multilayer-coated blazed grating with 33percent efficiency in the 3rd order in the EUV wavelength range” Lawrence Berkeley National Laboratory: Lawrence Berkeley National Laboratory. LBNL Paper LBNL-2275E © 2009 SPIE--The International Society for Optical Engineering https://orcid.org/0000-0001-6932-2612 en_US http://dx.doi.org/10.1117/12.826921 Proceedings of SPIE Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf The International Society for Optical Engineering SPIE |
| spellingShingle | Schattenburg, Mark Lee Chang, Chih-Hao Ahn, Minseung Padmore, Howard A. Yashchuk, Valeriy V. Gullikson, Eric M. Salmassi, Farhad Cambie, Rossana Anderson, Erik H. Voronov, Dmitriy L. Heilmann, Ralf K 5000 Groove/mm multilayer-coated blazed grating with 33% efficiency in the 3rd order in the EUV wavelength range |
| title | 5000 Groove/mm multilayer-coated blazed grating with 33% efficiency in the 3rd order in the EUV wavelength range |
| title_full | 5000 Groove/mm multilayer-coated blazed grating with 33% efficiency in the 3rd order in the EUV wavelength range |
| title_fullStr | 5000 Groove/mm multilayer-coated blazed grating with 33% efficiency in the 3rd order in the EUV wavelength range |
| title_full_unstemmed | 5000 Groove/mm multilayer-coated blazed grating with 33% efficiency in the 3rd order in the EUV wavelength range |
| title_short | 5000 Groove/mm multilayer-coated blazed grating with 33% efficiency in the 3rd order in the EUV wavelength range |
| title_sort | 5000 groove mm multilayer coated blazed grating with 33 efficiency in the 3rd order in the euv wavelength range |
| url | http://hdl.handle.net/1721.1/52705 https://orcid.org/0000-0001-6932-2612 |
| work_keys_str_mv | AT schattenburgmarklee 5000groovemmmultilayercoatedblazedgratingwith33efficiencyinthe3rdorderintheeuvwavelengthrange AT changchihhao 5000groovemmmultilayercoatedblazedgratingwith33efficiencyinthe3rdorderintheeuvwavelengthrange AT ahnminseung 5000groovemmmultilayercoatedblazedgratingwith33efficiencyinthe3rdorderintheeuvwavelengthrange AT padmorehowarda 5000groovemmmultilayercoatedblazedgratingwith33efficiencyinthe3rdorderintheeuvwavelengthrange AT yashchukvaleriyv 5000groovemmmultilayercoatedblazedgratingwith33efficiencyinthe3rdorderintheeuvwavelengthrange AT gulliksonericm 5000groovemmmultilayercoatedblazedgratingwith33efficiencyinthe3rdorderintheeuvwavelengthrange AT salmassifarhad 5000groovemmmultilayercoatedblazedgratingwith33efficiencyinthe3rdorderintheeuvwavelengthrange AT cambierossana 5000groovemmmultilayercoatedblazedgratingwith33efficiencyinthe3rdorderintheeuvwavelengthrange AT andersonerikh 5000groovemmmultilayercoatedblazedgratingwith33efficiencyinthe3rdorderintheeuvwavelengthrange AT voronovdmitriyl 5000groovemmmultilayercoatedblazedgratingwith33efficiencyinthe3rdorderintheeuvwavelengthrange AT heilmannralfk 5000groovemmmultilayercoatedblazedgratingwith33efficiencyinthe3rdorderintheeuvwavelengthrange |