Material selection and nanofabrication techniques for electronic photonic integrated circuits

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2009.

Bibliographic Details
Main Author: Holzwarth, Charles W., III (Charles Willett)
Other Authors: Henry I. Smith and Harry L. Tuller.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2010
Subjects:
Online Access:http://hdl.handle.net/1721.1/53248