Design of a novel six-axis metrology system for meso-scale nanopositioners

Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2009.

Bibliographic Details
Main Author:	King, Ryan N. (Ryan Nicholas)
Other Authors:	Martin L. Culpepper.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2010
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/54500

Internet

http://hdl.handle.net/1721.1/54500