Design of a novel six-axis metrology system for meso-scale nanopositioners
Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2009.
| Main Author: | |
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| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2010
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| Online Access: | http://hdl.handle.net/1721.1/54500 |
| _version_ | 1811089941062483968 |
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| author | King, Ryan N. (Ryan Nicholas) |
| author2 | Martin L. Culpepper. |
| author_facet | Martin L. Culpepper. King, Ryan N. (Ryan Nicholas) |
| author_sort | King, Ryan N. (Ryan Nicholas) |
| collection | MIT |
| description | Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2009. |
| first_indexed | 2024-09-23T14:27:56Z |
| format | Thesis |
| id | mit-1721.1/54500 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T14:27:56Z |
| publishDate | 2010 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/545002019-04-12T09:22:57Z Design of a novel six-axis metrology system for meso-scale nanopositioners Design of a novel 6-axis metrology system for meso-scale nanopositioners King, Ryan N. (Ryan Nicholas) Martin L. Culpepper. Massachusetts Institute of Technology. Dept. of Mechanical Engineering. Massachusetts Institute of Technology. Dept. of Mechanical Engineering. Mechanical Engineering. Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2009. Cataloged from PDF version of thesis. Includes bibliographical references (p. 55). The purpose of this research is to develop the best possible means and methods of building a six axis metrology system given cost and space constraints. Six axis measurements are a crucial part of precision engineering and characterizing machine performance, however commercially available sensors are not cost-efficient and are difficult to incorporate into meso-scale machines. The novel approach presented here uses three pairs of laser diodes and quadrant photodiodes to achieve six axis measurements. This paper presents a general parametric model that can predict the output of the photodiodes due to translations and rotations of the target for any geometry of the system. The device has performance characteristics of translational resolution in the range of microns depending on the geometry of the system, a bandwidth of 17.5 MHz, and dominant noise in the sensor of ±1.6 nm. This device will be useful in a variety of applications including nanomanufacturing, bio instrumentation, Dip Pen Nanolithography, AFM, and many more. by Ryan N. King. S.B. 2010-04-28T15:42:53Z 2010-04-28T15:42:53Z 2009 2009 Thesis http://hdl.handle.net/1721.1/54500 558693674 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 55 p. application/pdf Massachusetts Institute of Technology |
| spellingShingle | Mechanical Engineering. King, Ryan N. (Ryan Nicholas) Design of a novel six-axis metrology system for meso-scale nanopositioners |
| title | Design of a novel six-axis metrology system for meso-scale nanopositioners |
| title_full | Design of a novel six-axis metrology system for meso-scale nanopositioners |
| title_fullStr | Design of a novel six-axis metrology system for meso-scale nanopositioners |
| title_full_unstemmed | Design of a novel six-axis metrology system for meso-scale nanopositioners |
| title_short | Design of a novel six-axis metrology system for meso-scale nanopositioners |
| title_sort | design of a novel six axis metrology system for meso scale nanopositioners |
| topic | Mechanical Engineering. |
| url | http://hdl.handle.net/1721.1/54500 |
| work_keys_str_mv | AT kingryannryannicholas designofanovelsixaxismetrologysystemformesoscalenanopositioners AT kingryannryannicholas designofanovel6axismetrologysystemformesoscalenanopositioners |